NEXIV VMZ-R6555 - Higher speeds and greater precision than ever before.

Magnification, AF and illumination conditions can be finely adjusted for each specimen.
VMZ-R6555 offers 650 x 550 mm stroke, which is suitable for large components and "step-and-repeat" measurements of multiple pieces on the stage.

Key benefits

  • Six types of optical zooming head
  • Detection of 0.1 mm transparent layer
  • 8-segment ring illumination with three incident angles
  • High measuring accuracy
  • Faster throughput
  • 15x high-speed zoom

Applications

  • Surface analysis, Surface examination
  • Plastic manufacturing, Metal manufacturing
  • Cracks and Failure AnalysisI
  • Micro-electronics, Opto-electronics
  • Telecom & electronics, Antennae, Telescope optics

 

 

 

 

 

 

 

 

 

 

 

 

Benefits & features

Standard magnification zooming heads: type 1 - 3

Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.

High magnification zooming heads: type 4, TZ

Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.

Wide field-of-view zooming head: type A

Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.

Magnification vs. Field of view (mm)

Standard magnification zooming heads
Type 1
Optical magnification Total magnification Field of View (mm) 0.5× 18× 9.33×7.01 1× 36×
4.7×3.5		 2× 72× 2.33×1.75 4× 144× 1.165×0.875 7.5× 270× 0.622×0.467
Type 2
Optical magnification Total magnification Field of View (mm) 1× 36× 4.7×3.5 2× 72× 2.33×1.75 4× 144× 1.165×0.875 8× 288× 0.582×0.437 15× 540× 0.311×0.233
Type 3
Optical magnification Total magnification Field of View (mm) 2× 72× 2.33×1.75 4× 144× 1.165×0.875 8× 288× 0.582×0.437 16× 576× 0.291×0.218 30× 1080× 0.155×0.117

 

High magnification zooming heads
Type 4
Optical magnification Total magnification Field of View (mm) 4× 144× 1.165×0.875 8× 288× 0.582×0.437 16× 576× 0.291×0.218 32× 1152× 0.146×0.109 60× 2160× 0.07×0.068
Type TZ
Optical magnification Total magnification Field of View (mm) 1× 36× 
4.7×3.5		 2× 72× 2.33×1.75 4× 144× 1.165×0.875 7.5× 270× 0.622×0.467 16× 576× 0.291×0.218
32× 1152× 0.146×0.109 64× 2304× 0.073×0.055 120× 4320× 0.039×0.029    

 

Wide field-of-view zooming head
Type A
Optical magnification Total magnification Field of View (mm) 0.35× 12.6× 13.3×10 0.6× 21.6× 7.8×5.8 1× 36× 
4.7×3.5		 1.8× 64.8× 2.6×1.9 3.5× 126× 1.33×1

 

* Total magnification is that of a video window with 640 × 480 pixels on a 24-inch WUXGA monitor (1920 × 1200 pixels) recommended for the VMZ-R series.

Detection of 0.1 mm transparent layer

Designed to detect the surfaces of thin transparent materials, the new TTL Laser AF works with the same high speed and high accuracy as the VMR series Laser AF.

Focus on top surface in redFocus on bottom surface in blueNew TTL Laser AF The new sensor detects laser beams reflected on both top and bottom surfaces

8-segment ring illumination with three incident angles

Standard magnification zooming heads (type 1-3) come with 8-segment LED inner and outer ring illuminators as well as episcopic and diascopic illuminators. Incident angles of 37, 55 and 75 degrees, illumination directions by combining any 8-segment lights and light intensity can be adjusted.

 

* The incident angle of the 8-segment ring illuminator for type 4 is 50 degrees and for type A is 18 degrees.

 

Measuring accuracy is further improved

Measuring accuracy is further improved with high resolution linear encoder 'ModuRay' developed by Nikon.

Faster throughput

High rate of data transfer combined with fast illumination control provides faster throughput.

15x High-speed Zoom

5-step high-speed zoom with a zoom ratio of 15x allows both wide field-of-view at low magnification and high-resolution observation at high magnification (type 1 – 4).